Product Description
YNLREZ 910A perfluoroelastomer part is an amber colored translucent product with excellent resistance to fluorine-based plasmas, including amorphous/microcrystalline silicon thin film deposition. It has very low weight loss and ultra-low particle generation in fluorine-based plasmas (e.g. NF3.F2, etc.). It also has excellent resistance to dry chemistry and has excellent thermal stability, compression set and outgassing properties. It is suitable for use in plasma environments in semiconductor processes up to a maximum service temperature of 270°C.
YNLREZ 910A can be processed into 0-rings, diaphragms, gaskets, adhesive strips, sheets and customized products.