Category:
Other Fine Chemicals
CAS NO:
10025-78-2
Standard:
In-house Standards,
Specification
Purity,% 99.95
Resistivity ≥ 300 ohm-cm
Boron ≤ 0.1 ppba silicon
Carbon ≤ 5 ppma
Iron ≤ 5 ppba
Other chlorosilanes ≤ 500 ppm
transportation
DOT shipping name Trichlorosilane
DOT classification 4.3
DOT label Flammable liquid, corrosive
UN NO. UN 1295
CAS No. 10025-78-2
Technical Information
Cylinder condition @ 21.1°C liquid
Combustion limit in air 7-83%
Natural temperature (°C) 182
Molecular weight (g/mol) 135.45
Specific gravity (air =1) 4.67
Critical temperature (°C) 242.5
Critical temperature (psig)
Application
1. Chemical reactions in organosilicon
2. In semiconductor manufacturing: epitaxial deposition of silicon.