Category:
Other Fine Chemicals
CAS NO:
7783-55-3
Standard:
In-house Standards,
Specification
Purity,% 99.5
transportation
DOT shipping name Phosphorus trifluoride
DOT classification 2.3
DOT label Compressed gas, toxic, corrosive
UN NO. UN 3304
CAS No. 7783-55-3
CGA/DISS
Technical Information
Cylinder condition @ 21.1°C gas
The combustion limit in the air is not combustible
Natural temperature (°C)-
Molecular weight (g/mol) 87.969
Specific gravity (air =1) 3.038
Critical temperature (°C) -2.05
Critical temperature (psig) 612.73
Application
Used for epitaxy and ion implantation processes; also used as a fluorinating agent.