The HyperPureX ICM-E series integrated circuit electronic grade ultrapure water system guides the whole process of system design, manufacturing, installation and verification with strict compliance, and integrates multi-media filtration, activated carbon adsorption, softening, secondary RO2nd, degassing, EDI, ultrafiltration, ultraviolet sterilization and TOC degradation, resin ultra-purification, and terminal microfiltration purification units with a modular design, which are widely used in the processing and manufacturing of various precision electronic components such as semiconductor wafers and LCD screen cleaning, chips, etc.